Method and apparatus for drying objects using aerosols
US5685086A · kind A · utility
28Cited by
6References
17Claims
0Family size
Inventor
Key dates
| Filing date | Mar 14, 1996 |
| Grant date | Nov 11, 1997 |
| Priority date | — |
| Expiry date | Mar 14, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67028
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Method and apparatus for drying objects that may have been wetted in a manufacturing The objects are submerged in a rinse liquid in an enclosed chamber, and aerosol particles from a selected drying liquid are introduced into the chamber above the rinse liquid surface, forming a thin film on this surface. As the rinse liquid is slowly drained, some aerosol particles settle onto and form a film on the exposed surfaces of the objects, and displace and remove rinse liquid residues from the exposed surfaces. Surface contaminants are also removed by this process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.