Substrate holding device and manufacturing method therefor
US5685363A · kind A · utility
36Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 1995 |
| Grant date | Nov 11, 1997 |
| Priority date | — |
| Expiry date | Dec 7, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4935
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holding device of the invention includes a base cooled with a heat absorbing fluid, a flexible sheet being extended on a surface of the base for forming a sealed portion between the sheet and the base, a heat absorbing fluid with which the sealed portion is filled, a sheet-like rubber elastic material being disposed on the sheet, and a substrate retainer for pressing fringes of a substrate, placed on the rubber elastic material, against the base. Metal elastic members may be distributed almost uniformly in the sealed portion, in place of or together with, the rubber elastic material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.