Multi-parameter scanning system with moveable field mask
US5686731A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1996 |
| Grant date | Nov 11, 1997 |
| Priority date | — |
| Expiry date | Apr 30, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/55
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for scanning the visual characteristics of a surface includes an illumination system which scans a beam of light across the surface for reflection therefrom. The reflected beam is split into two parts. A first part goes to a control sensor which generates a control signal in response to the spatial distribution of the intensity of the reflected light. A second portion of the reflected light goes to a measuring sensor. A field mask is disposed in the beam of reflected light and operates to restrict the cross-sectional area of the beam which impinges upon the measuring sensor. Positioning of the field mask is controlled by a driver responsive to the control signal produced by the control sensor. In this manner, the field mask may be positioned so as to select only specularly reflected light for measurement. The system may also be operated to move the field mask in accord with a preselected program so as to determine the slope of the intensity of the reflected light, and this slope may be utilized to calculate the haze value of the surface being inspected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.