Excimer lamp with high pressure fill
US5686793A · kind A · utility
60Cited by
20References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1996 |
| Grant date | Nov 11, 1997 |
| Priority date | — |
| Expiry date | Mar 25, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B20/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.