Patent · US Expired

Apparatus for coating a substrate

US5688388A · kind A · utility

4Cited by

5References

16Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Martin Bahr · Merkendorf, DE
Gunter Brauer · Lehre, DE
Erwin Winter · Hanau, DE

Key dates

Filing date	Jul 29, 1996
Grant date	Nov 18, 1997
Priority date	—
Expiry date	Jul 29, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3405
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Pole shoes (3, 4, 5) of magnetically conductive material are provided inside of a first tubular target (2). Outside the target (2), a magnetic flux guide element (7) is provided, which has three pole shoes (8, 9, 10) directed toward the hollow body (1), which are connected to each other by magnets (12, 13). These magnets (12, 13) transmit the magnetic field through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across narrow gaps (6, 11).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.