Laser processing device
US5689327A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1995 |
| Grant date | Nov 18, 1997 |
| Priority date | — |
| Expiry date | Aug 29, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/16
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser processing device for collecting a laser beam from laser beam radiating means using an objective lens and irradiating a surface of a sample with the collected laser beam to form a fine pattern thereon is disclosed. The device comprises a uniform pellicle film having high transmittance to wavelength of the laser beam and provided between the objective lens and the surface of the sample. The laser beam radiated from the laser beam radiating means passes through a shutter and a beam expander, and is reflected by a dichroic mirror. The laser beam is then collected by the objective lens and passes through the pellicle film to be radiated on the surface of the sample. Thus, laser processing may be carried out without deteriorating performance of the objective lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.