Polysiloxane compounds and positive resist compositions
US5691396A · kind A · utility
34Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 1996 |
| Grant date | Nov 25, 1997 |
| Priority date | — |
| Expiry date | Sep 24, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D183/06
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The invention provides a novel polysiloxane compound, typically polyhydroxybenzylsilsesquioxane, having some hydroxyl groups replaced by acetal groups and optionally acid labile groups. The polysiloxane compound is useful as an alkali soluble polymer for positive resist material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.