Method and apparatus for ion beam transport
US5691537A · kind A · utility
8Cited by
16References
15Claims
0Family size
Inventors
Key dates
| Filing date | Jan 22, 1996 |
| Grant date | Nov 25, 1997 |
| Priority date | — |
| Expiry date | Jan 22, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0041
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Method and apparatus for maintaining an ion beam along a beam path from an ion source to an ion implantation station where workpieces are treated with the ion beam. A beam neutralizer is positioned upstream from the beam implantation station and injects neutralizing electrons into the ion beam. A magnetic field is created upstream from the position of the beam neutralizer for inhibiting upstream movement of neutralizing electrons. A disclosed technique for setting up the magnetic field for inhibiting electron movement is with spaced apart first and second permanent magnets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.