Methods for manufacturing cold cathode arrays
US5693235A · kind A · utility
5Cited by
14References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1995 |
| Grant date | Dec 2, 1997 |
| Priority date | — |
| Expiry date | Dec 4, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cold cathode emitter structure is described together with two methods for manufacturing it. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that serve as cold cathodes, to be easily positioned so that their apexes are located at the correct height relative to the gate lines. A second important feature is that the openings in the gate lines through which the emitted electrons will pass are made to be significantly narrower than in conventional designs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.