Apparatus for the purification of waste gas

US5693293A · kind A · utility

Assignee

• Das-Dunnschicht Anlagen Systeme GmbH Dresden · DE

Inventors

• Horst Reichardt · Dresden, DE
• Lothar Ritter · Neustadt an der Donau, DE
• Lutz Labs · Dresden, DE
• Konrad Gehmlich · Dresden, DE
• Michael Hentrich · Dresden, DE
• Gunter Firkert · Dresden, DE
• Volkmar Hennig · Dresden, DE
• Matthias Schubert · Rendsburg, DE

Key dates

• Filing date: Dec 18, 1995
• Grant date: Dec 2, 1997
• Expiry date: Dec 18, 2015

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F23L7/002
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Waste gas, in particular from plants for the chemical vapor-phase deposition and for the separation and etching by plasma processes, is purified from toxic agents by a method in which partial processes of the purification, such as thermal decomposition and oxidation, sorption of solid and gaseous reaction products, hydrolysis and cooling, are combined to act in a single reaction chamber. The reaction products of the waste gas burnt in a flame are led, directly in the combustion chamber, through a space filled with a finely dispersed liquid. This liquid forms a liquid film on all parts and inside walls of the reaction chamber. In a combustion chamber with a burner, the mentioned liquid distribution is obtained by a spraying device. Effective purification from toxic agents, and little corrosion of the components of the reaction chamber are achieved, any growth of solid reaction products in the combustion chamber being avoided. The generation of secondary toxic agents during the combustion of the waste gas is avoided.