Infrared detector
US5693942A · kind A · utility
13Cited by
2References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 1996 |
| Grant date | Dec 2, 1997 |
| Priority date | — |
| Expiry date | Apr 3, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/01322
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared detector has a sensor with an infrared detecting portion composed of a thermal sensitive resistor film on an insulating film provided on a surface of a semiconductor substrate. The sensor is installed on a base such that it bridges a cavity in the substrate. The cavity is sealed by an infrared reflecting film or an infrared reflecting metallic board.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.