Anodic bonding method for making pressure sensor
US5695590A · kind A · utility
22Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Dec 9, 1997 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pedestal mount capacitive pressure sensor (10) is supported in a housing (11) and used to sense fluid pressures to provide air pressure data relating to the performance of air vehicles. The capacitive sensor uses a thick base plate (40) on which a diaphragm (48) is mounted. A capacitive electrode (52) is mounted to the diaphragm and pressure deflects the diaphragm to provide an output. The pressure sensor (10) is mounted in an outer housing (11) using a stress isolating pedestal (20).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.