Optical caliper with compensation for specimen deflection and method
US5696589A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 20, 1996 |
| Grant date | Dec 9, 1997 |
| Priority date | — |
| Expiry date | May 20, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.