Optical component comprising layers of porous silicon

US5696629A · kind A · utility

Assignee

• Forschungszentrum Jülich GmbH · DE

Inventors

• Michael Berger · Bad Vilbel, DE
• Herbert Munder · Bergheim, DE
• Stephan Frohnhoff · Aachen, DE
• Markus Thonissen · Nettetal, DE
• Hans Luth · Aachen, DE

Key dates

• Filing date: Dec 4, 1995
• Grant date: Dec 9, 1997
• Expiry date: Dec 4, 2015

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/3227
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides of anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arises not only from the ease and economy of manufacture, but also in the facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.