Electrostatically operated micromechanical capacitor
US5696662A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 1995 |
| Grant date | Dec 9, 1997 |
| Priority date | — |
| Expiry date | Aug 21, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatically controlled, micromachined micromechanical capacitor having an adjustable, extensive tuning range. A configuration consists of a set of various sized beams or plates adjacent to a common plate or plates. The pairs of plates are linearly moved relative to each other to provide an adjustable capacitance. The movement of the plates is caused electrostatically by an application of a DC or low frequency voltage to the respective plates. The signals that are processed by these micromechanical capacitors are typically in the megahertz range and higher. The process for micromachining the micromechanical capacitor is similar to the process utilized in integrated circuit fabrication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.