Combined semiconductor thin film pinhole and semiconductor photodetectors and method of manufacture
US5698453A · kind A · utility
Inventors
Key dates
| Filing date | Jun 19, 1996 |
| Grant date | Dec 16, 1997 |
| Priority date | — |
| Expiry date | Jun 19, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/977
Abstract
A thin-film semiconductor pinhole component with monolithically integrated position-sensing photodetectors is herein referred to as a Position Sensitive Pinhole (PSP). Another embodiment is also discussed where a PSP is integrated onto a platform with controllable motion and is herein referred to as a Movable Position Sensitive Pinhole (MPSP). A third embodiment describes the MPSP with capacitive, electrostatic actuation incorporated into the device to achieve controlled motion, herein referred to as a Capacitively Actuated Movable Position Sensitive Pinhole (CAMPSP). Each of those embodiments of the present invention are discussed, as are their method of manufacture and use in a laser environment as a spatial filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.