Self-compensating accelerometer
US5698785A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1996 |
| Grant date | Dec 16, 1997 |
| Priority date | — |
| Expiry date | Aug 7, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A motion sensor for sensing motion or acceleration of a body, such as the type used in onboard automotive and aerospace safety control system, navigational system or active suspension control system. The motion sensor includes a support frame, a bridge projecting from the support frame, and a proof mass suspended from the support frame by the bridge so as to enable the proof mass to respond to an input force imposed on the motion sensor. The bridge is provided with a strain sensing element that generates an acceleration signal in response to a deflection of the proof mass. The motion sensor further includes a structural feature capable of compensating for mechanically and thermally induced strains imposed on the motion sensor by generating a compensation signal in response to such strains. Finally, the sensor includes circuitry for detecting the acceleration and compensation signals and canceling the compensation signal from the acceleration signal, so as to produce an output signal that more closely corresponds to the input force on the proof mass than does the acceleration signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.