Thin film piezoelectric arrays with enhanced coupling and fabrication methods
US5698928A · kind A · utility
38Cited by
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6Claims
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Key dates
| Filing date | Aug 17, 1995 |
| Grant date | Dec 16, 1997 |
| Priority date | — |
| Expiry date | Aug 17, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0435
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An array of thin film piezoelectric resonators are formed on a substrate and connected in parallel to form a single piezoelectric resonator with enhanced piezoelectric coupling. The array includes a first conductive layer positioned on the substrate and defining a first electrode, a plurality of columns of piezoelectric material positioned on the conductive layer and each defining a separate piezoelectric resonator, and a second conductive layer positioned on the plurality of columns and defining a second electrode. The columns are selectively deposited or deposited as a single layer and etched into columns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.