Optical apparatus for inspecting laser texture

US5699160A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Michael Barenboim · Boca Raton, US
• Peter Michael Baumgart · San Diego, US
• Peter P. Chrusch · Boynton Beach, US
• Benny Michael Harper · Boca Raton, US
• Benjamin Karni · San Jose, US
• Pieter J. Kerstens · Boca Raton, US
• Michael G. Lisanke · Boynton Beach, US
• Hong S. Seing · San Jose, US
• Huizong Lu · Coral Springs, US
• Lanphuong Thi Pena · Jacksonville, US
• Ali Reza Taheri · Boca Raton, US
• Andrew Ching Tam · Saratoga, US

Key dates

• Filing date: Sep 23, 1996
• Grant date: Dec 16, 1997
• Expiry date: Sep 23, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2290/70
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Inspection apparatus for determining the profile of textured spots extending in a pattern along a surface of a magnetic disk includes an interferometer which illuminates first and second, adjacently disposed test spots on the surface. The disk and the interferometer are moved, relative to one another, so that one of the test spots traverses the textured spots in the pattern while the other test spot is moved along a flat portion of the disk surface. In one embodiment, the inspection apparatus is built into the device forming the textured spots, providing feedback controlling the texturing process.