Wafer gripper

US5700046A · kind A · utility

Assignee

• Silicon Valley Group, Inc. · US

Inventors

• Matthew J. Van Doren · Pleasanton, US
• Don R. Sauer · San Jose, US
• Alexander H. Slocum · Bow, US
• David Pap Rocki · Pleasanton, US
• Johann Tam · Saratoga, US
• Larry Gerszewski · Sunnyvale, US

Key dates

• Filing date: Sep 13, 1995
• Grant date: Dec 23, 1997
• Expiry date: Sep 13, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/141
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.