Method for mapping mechanical property of a material using a scanning force microscope
US5700953A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 1996 |
| Grant date | Dec 23, 1997 |
| Priority date | — |
| Expiry date | Apr 3, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The method for mapping a mechanical property of a surface of a sample with a scanning force microscope comprises the steps of (a) scanning a fine tip in contact with the surface of the sample within a predetermined scan area, the fine tip being supported on an end of a cantilever beam, (b) applying a loading force on the surface of the sample by the fine tip, (c) using a constant frequency sine wave to oscillate the cantilever beam relative to the surface of the sample, (d) measuring a detector response of the fine tip at the end of the cantilever beam, (e) determining an amplitude of the detector response and a change in phase angle of the detector response relative to the sine wave used to oscillate the cantilever beam, and (f) relating the amplitude and the change in phase angle to a property of the surface of the sample. A feedback system is utilized which regulates the total force imposed by the fine tip onto the surface of the sample so that the amplitude of the detector response is maintained constant. Because the force does not depend on the topography of the sample, the average cantilever deflection is directly related to the mechanical property of the surface of the sampl…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.