Integrated infrared microlens and gas molecule getter grating in a vacuum package
US5701008A · kind A · utility
75Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1996 |
| Grant date | Dec 23, 1997 |
| Priority date | — |
| Expiry date | Nov 29, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared (IR) microlens array has a plurality of microlenses (12) aligned with respective IR detector array pixels (6) to focus incoming IR radiation onto the pixels (6) to improve the efficiency of IR detection, and a gas molecule getter grating (14) inside a vacuum-sealed Dewar assembly that houses the detector array (4) increases the surface area of the getter (15) to improve the efficiency of removing residual gas molecules from the Dewar assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.