Flat scanning stage for scanned probe microscopy
US5705878A · kind A · utility
32Cited by
15References
15Claims
0Family size
Inventors
Key dates
| Filing date | Nov 29, 1995 |
| Grant date | Jan 6, 1998 |
| Priority date | — |
| Expiry date | Nov 29, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.