Electromagnetic beam directing means-sample analysis system stage, and method of use
US5706087A · kind A · utility
7Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 1996 |
| Grant date | Jan 6, 1998 |
| Priority date | — |
| Expiry date | Oct 4, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an electromagnetic beam directing means for use with sample analysis systems, such as reflectometers, ellipsometers and polarimeters and the like, use of which facilitates investigation of sample systems which are not mounted to a sample analysis system sample system supporting stage. The present invention eliminates the requirement of extensive sample analysis system component realignment when alternatingly performing analysis of sample systems mounted upon, and mounted other than upon, a sample analysis system sample system supporting stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.