Molecular vacuum pump with a gas-cooled rotor
US5707213A · kind A · utility
16Cited by
3References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 6, 1996 |
| Grant date | Jan 13, 1998 |
| Priority date | — |
| Expiry date | Feb 6, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/5846
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method of cooling rotor elements of a molecular vacuum pump having stator and rotor elements, a suction flange defining a gas inlet, and a gas outlet spaced from the suction flange, the method including providing additional gas inlet between the suction flange and the gas outlet and admitting through the additional gas inlet a cooling gas having a thermal conductivity larger than that of the compressible gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.