Patent · US Expired

Crystal pulling apparatus

US5707447A · kind A · utility

5Cited by

3References

4Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Winfried Schulmann · Kleinostheim, DE
Johann Scholler · Eppertshausen, DE

Key dates

Filing date	Sep 26, 1996
Grant date	Jan 13, 1998
Priority date	—
Expiry date	Sep 26, 2016

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T117/1088
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A crystal pulling apparatus for producing a crystal boule (17) from a material melted in a crucible (4) has, in a tank (1), a heater (5) surrounding the crucible (4). The tank (1) has in the area of the crucible (4) an annular chamber (8) defined on the heater (5) side by an inner protective wall (6) and connected to the shielding gas outlet (14, 15), and on the outside by an outer protective wall (7) behind which the thermal insulation (10) of the tank (1) is located.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.