Method and apparatus for selectively annealing heterostructures using microwave
US5707466A · kind A · utility
21Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1995 |
| Grant date | Jan 13, 1998 |
| Priority date | — |
| Expiry date | Mar 31, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention discloses a process for selectively annealing heterostructures using microwaves. A heterostructure, comprised of a material having higher microwave absorption and a material having lower microwave absorption, is exposed to microwaves in the cavity. The higher microwave absorbing material absorbs the microwaves and selectively heats while the lower microwave absorbing material absorbs small amounts of microwaves and minimally heats. The higher microwave absorbing material is thereby annealed onto the less absorbing material which is thermally isolated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.