Multiple axes drive apparatus with electrostatic drive means
US5708319A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 20, 1996 |
| Grant date | Jan 13, 1998 |
| Priority date | — |
| Expiry date | Mar 20, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multiple axes drive apparatus having a plurality of electrostatic actuators for applying driving forces in a plurality of different directions within a plane to a driven member. Each electrostatic actuator of the drive apparatus includes a first member that has a plurality of first electrode strips arranged in a single direction with a predetermined pitch, and a second member that has a plurality of second electrode strips arranged in the same direction as the first electrode strips with the same pitch. The members are located opposite to each other so one of the members moves along the single direction in response to a Coulomb force generated between the electrode strips when voltage is applied to the electrode strips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.