Monomorph thin film actuated mirror array
US5710657A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 17, 1995 |
| Grant date | Jan 20, 1998 |
| Priority date | — |
| Expiry date | Apr 17, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A thin film actuated mirror is disclosed having a substrate, a deformable structure mounted to the substrate, and a mirror surface interconnected to the deformable structure such that the mirror surface tilts in response to the deformation of the deformable material layer. The deformation occurs due to the effective strain gradient across the monomorph thickness which is accomplished by varying the electric field across the thickness or the strain parameter across the thickness. The deformable structure includes an active material layer fabricated from a semi-conductive ferroelectric ceramic material and two metal electrodes, each of the electrodes being mounted on opposing surfaces of the active material layer, wherein an electrical signal applied across the active material layer between the electrodes causes deformation of the active material layer. Alternatively, the active material layer may be fabricated from two layers, an upper layer of an active piezoelectric material and a lower layer of an inactive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.