Output controller for laser device
US5710787A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1995 |
| Grant date | Jan 20, 1998 |
| Priority date | — |
| Expiry date | Jun 5, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/13
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An object is to perform controlling operation always accurately to eliminate a spiking phenomenon generated in a laser device. In an output controller (6), excitation intensity data causing energies of continual pulses to be set to have a desired identical value is previously stored in association with the respective continual pulses. In an output monitor (5), the energies of the oscillated pulses are detected. And detected values of energies of pulses in a continual pulse oscillation already done are compared with a desired pulse energy value and previously-stored charging voltages associated with the respective pulses are corrected in the output controller (6) on the basis of the comparison result. When the present invention is applied to control of an output of a light source in an aligner, an accuracy of control of exposure light can be remarkabley improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.