Wafer carrier with door
US5711427A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 12, 1996 |
| Grant date | Jan 27, 1998 |
| Priority date | — |
| Expiry date | Jul 12, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67373
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that extend and retract from the edge portion of the door into and out of the slots for latching and unlatching the door on the door receiving frame. The door also has wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The retractable latching portions and wafer retaining arms are linked to a rotatable cammed member in the interior of the door. The cammed member utilizes cammed surfaces configured to first latch the door and to then extend the wafer retaining arms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.