High-precision stepped microstructure bodies

US5716741A · kind A · utility

Assignee

• MicroParts Gesellschaft fur Mikrostrukturtechnik mbH · DE

Inventors

• Holger Reinecke · Emmendingen, DE
• Arnd Rogner · Karlsruhe, DE
• Friedolin Franz Noeker · Karlsruhe, DE
• Ulrich Sieber · Karlsruhe, DE
• Gerd Pruefer · Aßlar, DE
• Helge Pannhoff · Hamburg, DE
• Uwe Brenk · Kämpfelbach, DE

Key dates

• Filing date: Apr 2, 1996
• Grant date: Feb 10, 1998
• Expiry date: Apr 2, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0035
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present invention concerns stepped mould inserts, a method of producing the same and high-precision stepped microstructure bodies moulded therewith. The present stepped mould inserts and method of producing the same are more simple than previous methods. The lithographically produced regions of a patterned resist layer, which are exposed by development on a flat plate, are filled with metal. The layer may be mechanically removed, down to a predetermined thickness. After the residues of the resist have been dissolved out, if necessary or desired, this operation is repeated from one to several times. The regions removed from the resist layer are filled with metal, covered and separated from the resist layer, thus providing a multistep metallic mould insert. High-precision microstructure bodies having a multistep structure are produced with the present stepped mould insert.