Patent · US Expired

Method and device for controlling the electric current density across a workpiece during heat treatment in a plasma

US5717186A · kind A · utility

4Cited by
0References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 13, 1996
Grant dateFeb 10, 1998
Priority date
Expiry dateJun 13, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05H1/36
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

In a method for controlling the electric current density across a workpiece in a furnace during heat treatment in a plasma an auxiliary electrode with a known surface area is introduced into the furnace. A batch of workpieces is then introduced into the furnace. First a plasma of a neutral gas is generated within the furnace. The total current within the furnace and the current within the auxiliary electrode are measured. The surface area of the workpieces is calculated according to the equation ##EQU1## The auxiliary electrode is then switched off and a material-transmitting plasma is generated. The nominal total electric current for controlling a desired nominal current density is then calculated according to the equation EQU I.sub.Gnominal =F.sub.CH .multidot.J.sub.nominal. The total current is measured in the furnace and is set to the nominal current value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.