Unsticking mirror elements of digital micromirror device
US5717513A · kind A · utility
25Cited by
8References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 10, 1995 |
| Grant date | Feb 10, 1998 |
| Priority date | — |
| Expiry date | Jan 10, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of repositioning mirror elements (10) of a digital micromirror device (DMD) that have become stuck in an "on" or an "off" position. The mirror element (10) is irradiated with a short high-energy pulse of visible light. The method may be easily performed during fabrication at the wafer level, and may be followed by a passivation step to prevent further sticking.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.