Diffraction management for grazing incidence interferometer
US5719676A · kind A · utility
6Cited by
13References
73Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 12, 1996 |
| Grant date | Feb 17, 1998 |
| Priority date | — |
| Expiry date | Apr 12, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Test surfaces are measured at grazing incidence with an interferometer using diffractive optics for manipulating reference and test beams. A leading diffractive optic separates the reference and test beams, and a following diffractive optic recombines the beams after the test beam is reflected from the test surface. Extraneous light, including light from other orders of diffraction, is isolated and blocked from combining with test and reference wavefronts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.