Deformable mirror and method for fabricating the same and apparatus using a deformable mirror
US5719846A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1996 |
| Grant date | Feb 17, 1998 |
| Priority date | — |
| Expiry date | Nov 29, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2007/0006
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A deformable mirror for reflecting a light beam incident thereon of the present invention includes: a flexible member which has a reflective surface and is flexibly deformable; a substrate having a reference surface which faces the flexible member; and a driving section for making the flexible member adhere to the reference surface of the substrate, thereby deforming the reflective surface of the flexible member to correspond to the reference surface. The shape of the reference surface is designed in such a manner that the light beam is provided with a spherical aberration when the reflective surface adheres to the reference surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.