Controlled carbon content MOD precursor materials using organic acid anhydride
US5721009A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1996 |
| Grant date | Feb 24, 1998 |
| Priority date | — |
| Expiry date | Jun 24, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Metal organic acid salt solutions for use as precursor materials for forming layered ferroelectric thin films are synthesized using an organic acid anhydride as the exchange reagent. The reaction is much faster than previous techniques, allows exact control of exchange with control of hydrolysis product, and may be used to control the solvent of the final solution. The reaction creates no water, and can be used to exactly control the extent of reaction of all metals. By using less than or equal to a stoichiometric amount of anhydride and then further reacting the remaining alkoxides, lower carbon content solutions with less decomposable organic can be formed. As such, the present invention discloses a much improved and faster synthesis technique giving improved solutions and corresponding thin film metal oxide compositions with improved and consistent electrical performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.