Process for producing layers of cubic boron nitride

US5723188A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Holger Luthje · Halstenbek, DE
• Klaus Bewilogua · Plaisir, FR
• Simone Daaud · Braunschweig, DE

Key dates

• Filing date: Sep 4, 1996
• Grant date: Mar 3, 1998
• Expiry date: Sep 4, 2016

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/3414
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Process for producing wear-resistant layers of cubic boron nitride or wear-resistant layers containing cubic boron nitride by sputtering with RF or DC voltage in the operating mode of an unbalanced magnetron, in which the plasma is generated by DC arc discharges or DC operated magnetron cathodes. The initial target for the production of the layer from which the material is removed comprises electrically conductive material containing boron, preferably boron carbide, and, in the process, the reactive process is conducted with the addition of N.sub.2 and Ar in such a way that the necessary stoichiometric ratio BiN in the layer can be adjusted.