Angular velocity sensor having a balanced tuning fork structure
US5723788A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1996 |
| Grant date | Mar 3, 1998 |
| Priority date | — |
| Expiry date | Dec 4, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high-performance angular velocity sensor has a tuning-fork structure in which two vibrator units consisting of piezoelectric elements are coupled to each other. The angular velocity sensor comprises two metal plates, a first vibrator including a first actuator and a first detector joined orthogonally to each other, and a second vibrator including a second actuator and a second detector joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in parallel along an axis of detection. The first actuator and the first detector include piezoelectric elements bonded to the first metal surface, and the second actuator and the second detector include piezoelectric elements bonded to the second metal surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.