Bulk micromachined inductive transducers on silicon
US5724015A · kind A · utility
34Cited by
2References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 1995 |
| Grant date | Mar 3, 1998 |
| Priority date | — |
| Expiry date | Jun 1, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2050/007
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.