Mounting member method and apparatus with variable length supports
US5724121A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 1995 |
| Grant date | Mar 3, 1998 |
| Priority date | — |
| Expiry date | May 12, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70708
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deformable substrate chuck includes a deformable mounting plate supported by a plurality of individually controllable variable-length actuators. Each actuator is controllable to vary the height of the portion of the deformable mounting plate which it supports. A chamber within the mounting plate accessible through a vacuum port can be evacuated to hold a substrate such as a semiconductor wafer or a flat panel display to a porous top surface of the mounting plate. An optical sensing system senses the shape of the substrate and generates control signals used to control the lengths of the variable-length actuators to control the shape of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.