Semiconductor wafer case
US5725100A · kind A · utility
21Cited by
8References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 1996 |
| Grant date | Mar 10, 1998 |
| Priority date | — |
| Expiry date | Nov 14, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor wafer case provides high resistance to vibration. The semiconductor wafer can be easily accessed from the case. The semiconductor wafer case includes a case body and a holder in which blade-type presser feet are provided. An end of each of the presser feet has a V-shaped cross-section. Spaces are provided between presser feet (32a, 33a) and presser feet (32b, 33b). Two holders of the same shape are provided at opposite sides of the case body so that the holders can hold the semiconductor wafer horizontally.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.