Patent · US Expired

Dip coating apparatus having a single coating vessel

US5725667A · kind A · utility

18Cited by
20References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 1, 1996
Grant dateMar 10, 1998
Priority date
Expiry dateMar 1, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03G5/0525
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

There is disclosed a dip coating apparatus including: (a) a single coating vessel capable of containing a batch of substrates vertically positioned in the vessel, wherein there is absent vessel walls defining a separate compartment for each of the substrates; (b) a coating solution disposed in the vessel, wherein the solution is comprised of materials employed in a photosensitive member and including a solvent that gives off a solvent vapor; and (c) a solvent vapor uniformity control apparatus which minimizes any difference in solvent vapor concentration encountered by the batch of the substrates in the air adjacent the solution surface, thereby improving coating uniformity of the substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.