Process and apparatus for producing a functional structure of a semiconductor component
US5725914A · kind A · utility
47Cited by
24References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 26, 1995 |
| Grant date | Mar 10, 1998 |
| Priority date | — |
| Expiry date | Sep 26, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/093
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In order to improve a process and an apparatus for producing a functional structure of a semiconductor component, which comprises layers arranged on a base substrate and defining the entire functions of the semiconductor component, such that the functional structure of the semiconductor components can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components it is suggested that all the layers be produced without lithography and applied to the base substrate one after the other exclusively with physical layer application processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.