Electrostatic precipitator for a gas discharge laser
US5729564A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 31, 1996 |
| Grant date | Mar 17, 1998 |
| Priority date | — |
| Expiry date | Jul 31, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/036
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatic precipitator is provided within the housing of a gas discharge laser, such as an exciter laser, to collect and trap dust particles generated in the course of laser operation. The precipitator comprises a plurality of spaced collector plates mounted within the laser housing for flow-through passage of a lasing gas circulated by a fan through a laser discharge zone disposed between a pair of main electrodes. The collector plates are appropriately charged to define one precipitator pole, the opposite pole being defined by the laser discharge zone and the ionization and fluorescent discharge associated therewith during laser operation. The collector plates are shaped and spaced for changing the lasing gas flow direction and for reducing the flow velocity as the lasing gas circulates between the plates, to achieve enhanced electrostatic collection of dust. The collector plates additionally include capture troughs for capturing dust particles that are attracted to the plate surfaces but otherwise not retained by electrostatic forces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.