Discharge unit and electrode for a pulsed discharge laser

US5729565A · kind A · utility

Assignee

• Lambda Physik Gesellschaft zur Herstellung von Larsen GmbH · DE

Inventors

• Anton Meller · Göttingen, DE
• Frank Voss · Berlin, DE

Key dates

• Filing date: Nov 7, 1996
• Grant date: Mar 17, 1998
• Expiry date: Nov 7, 2016

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.