Producing solar cells by surface preparation for accelerated nucleation of microcrystalline silicon on heterogeneous substrates
US5730808A · kind A · utility
40Cited by
3References
50Claims
0Family size
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Key dates
| Filing date | Jun 27, 1996 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Jun 27, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
Attractive multi-junction solar cells and single junction solar cells with excellent conversion efficiency can be produced with a microcrystalline tunnel junction, microcrystalline recombination junction or one or more microcrystalline doped layers by special plasma deposition processes which includes plasma etching with only hydrogen or other specified etchants to enhance microcrystalline growth followed by microcrystalline. nucleation with a doped hydrogen-diluted feedstock.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.