Micromachining of polytetrafluoroethylene using radiation
US5730924A · kind A · utility
10Cited by
8References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1995 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Dec 27, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29K2027/18
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method of micromachining polytetrafluoroethylene by applying radiation light to the surface of polytetrafluoroethylene, includes the steps of: preparing a workpiece including a region made of polytetrafluoroethylene; preparing a mask having patterned areas substantially transmitting and not transmitting the radiation light; and applying the radiation light containing at least ultraviolet rays of a wavelength of 160 nm to a surface of the workpiece through the mask. Polytetrafluoroethylene can be microscopically processed, while obtaining a high aspect ratio and processing a large area with ease.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.