Position sensitive particle sensor and manufacturing method therefor
US5731584A · kind A · utility
51Cited by
4References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1996 |
| Grant date | Mar 24, 1998 |
| Priority date | — |
| Expiry date | Jul 12, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J47/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microgap sensor, and manufacturing method therefor, which includes a cathode and at least one strip anode parallel to the cathode, in which the strip anode is separated and insulated from the cathode by an insulation layer made from a polymeric material. The microgap sensor further includes a cathodic drift electrode substantially parallel to the cathode, the cathode and drift electrode being separated by a gap fillable with an ionizable gas. The gap is considerably greater than the thickness of the insulating layer, and the strip anode is located in the gap between the cathode and the drift electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.