Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
US5732744A · kind A · utility
557Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1996 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Mar 8, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87917
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.